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fab1 und fab+

The new fab modules provide the same rich features, ease of use and high flexibility our SAM42 is currently famous for. In Addition the new machines also provide something repeatedly requested: SPEED!

Fab is a completely new design, regarding software as well as hardware. Some Highlights

  • Massive aluminum die cast base with integrated linear servos and servo driven Z-axis
  • Rugged steel frame
  • Inline capable
  • Wafer sizes up to 12", or 2x8" in parallel
  • Substrates up to 400mm
  • Digital camera system
  • Tool changer
  • programmable forces and pressures
  • even more simplified fully graphical application programming
  • SQL-database for product and library data
  • Dual core CPU
  • Linux 2.6 operating system

The fab modules also offer  an extensive list of software and hardware featuers.

Get a more colorful view in our product information sheet.


Industrielle Automatisierungstechnik
Draisstraße 11a
D-77815 Bühl
Phone: +49 7223 2818483 · Fax: +49 7223 2818485
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VAT Nr.: DE813073000 · register of companies: Amtsgericht Mannheim HRB 211214